Zinc oxide/molybdenum-doped indium oxide/zinc oxide (ZnO/IMO/ZnO) multilayer thin films are grown using pulsed laser deposition technique. The effect of substrate temperature on structural, optical, and electrical properties of multilayer films is studied. It is observed that films grown at high substrate temperature are oriented along (0 0 2) and (2 2 2) direction for ZnO and IMO respectively. The crystallinity of these films increases with increase in substrate temperature. It is also seen that conductivity, carrier concentration, and mobility increase with increase in temperature. The multilayer film grown at 500 degrees C has low resistivity (7.67 x 10 (5) Omega cm), high carrier concentration (3.90 x 10(20) cm (3)), and high mobility (209 cm(2)/Vs). (C) 2009 Elsevier B.V. All rights reserved.