Silicon diffusion layers in AISI 304 and AISI 316 type stainless steels were investigated as an alternative to surface barrier coatings for diamond film growth. Uniform 2 mu m thick silicon rich interlayers were obtained by coating the surface of the steels with silicon and performing diffusion treatments at 800 degrees C. Adherent diamond films with low sp(2) carbon content were deposited on the diffused silicon layers by a modified hot filament assisted chemical vapor deposition (HFCVD) method. Characterization of as-siliconized layers and diamond coatings was performed by energy dispersive X-ray analysis, scanning electron microscopy, X-ray diffraction and Raman spectroscopy. (C) 2010 Elsevier B.V. All rights reserved.