A series of (Fe57Co24Ni4Nb2B13)(x)-(SiO2)(1-x) nano-granular thin films were fabricated by magnetron sputtering with different oblique incidence angle theta and excellent soft magnetic properties are achieved. Based on the results of magnetic field anneal at different temperature T-a, it is evidenced that orientation of atomic pairs contributes to the annealing treatment, and could manipulate magnetic anisotropy. The damping coefficient. decreases with increasing angle theta and this is ascribed to the anisotropy dissipation. (C) 2010 Elsevier B.V. All rights reserved.