CeO2 films were prepared on LaMnO3/MgO/Gd2Zr2O7 multi-coated Hastelloy C276 tapes by laser chemical vapor deposition at different laser power (P-L) from 46 to 101 W. Epitaxial (1 0 0) CeO2 films were prepared at P-L = 46-93W (deposition temperature, T-dep = 705-792 K). Epitaxial CeO2 films had rectangular-shaped grains at P-L = 46-77W(T-dep = 705-754 K), while square-shaped grains were obtained at PL = 85-93W(Tdep = 769-792 K). CeO2 films showed a columnar microstructure. Epitaxial (1 0 0) CeO2 films with rectangular grains exhibited full width at half maximum of omega-scan on (2 0 0) reflection and phi-scan on (2 2 0) reflection of 3.4-3.2 degrees and 6.0-7.2 degrees, respectively. The deposition rate of the epitaxial (1 0 0) CeO2 films had a maximum of 4.6 mu mh(-1) at P-L = 77W (T-dep = 754 K). (C) 2010 Elsevier B. V. All rights reserved.