Several techniques have been developed in order to characterize electrical properties of surfaces in micrometer/nanometer scale. Obtaining of the spatial distribution of sample resistance, capacitance or potential requires separate measurements performed in different scanning modes. On the other hand, analysis of the frequency response of investigated system enables determination of several physical quantities in single measurement cycle. In this paper authors discuss possibility of obtaining the spatial impedance characteristic by means of built-in capabilities of the AFM device. Factors influencing the measurements and shortcomings of the proposed methodology are discussed together with postulated solutions. (C) 2009 Elsevier Ltd. All rights reserved.