The optimization of electrospinning SU-8 2100 negative photoresist was performed to create carbon micro/nanofibers and beads that can be patterned after electrospinning by using UV radiation. The fiber diameters had a range of 300 nm to 1 mu m, based upon the selected electrospinning parameters. Low concentrations of the SU-8 2100 resulted in beads while specific higher concentrations produced well-defined fibers. Fibers and beads were converted to carbon through pyrolysis and retained their three dimensional structure. By utilizing the photosensitive properties of the SU-8 negative photoresist, the electrospun fibers were patterned by UV photolithography. The fibers and beads were characterized by SEM and Raman microscopy, respectively. (C) 2010 Wiley Periodicals, Inc. J Appl Polym Sci 118: 405-412, 2010