Poly(ethylene oxide) (PEO) and low molecular weight poly(ethylene glycol) (PEG) were covalently immobilized on silicon wafers and gold films by way of the CH insertion reaction of perfluorophenyl azides (PFPAs) by either photolysis or thermolysis. The immobilization does not require chemical derivatization of PEO or PEG, and polymers of different molecular weights were successfully attached to the substrate to give uniform films. Microarrays were also generated by printing polymer solutions on PFPA-functionalized wafer or Au slides followed by light activation. For low molecular weight PEG, the immobilization was highly dependent on the quality of the film deposited on the substrate. While the spin-coated and printed PEG showed poor immobilization efficiency, thermal treatment of the PEG melt on PFPA-functionalized surfaces resulted in excellent film quality, giving, for example, a grafting density of 9.2 x 10(-4) angstrom(-2) and an average distance between grafted chains of 33 angstrom for PEG 20,000. The anti-fouling property of the films was evaluated by fluorescence microscopy and surface plasmon resonance imaging (SPRi). Low protein adsorption was observed on thermally-immobilized PEG whereas the photoimmobilized PEG showed increased protein adsorption. In addition, protein arrays were created using polystyrene (PS) and PEG based on the differential protein adsorption of the two polymers. (C) 2010 Elsevier Inc. All rights reserved.