Currently, the III-V compound semiconductor epi industry uses roughly 10,000 kg of TMGa per year. Virtually all of this TMGa is distributed in stainless-steel bottles of 2.5 kg content or less. At the point of use these bottles are temporarily installed as part of the OMVPE reactor and replaced and returned to the manufacturer when depleted. This traditional distribution system is costly to operate and its performance lags behind the performance of a properly designed and set up central delivery system. The precision and control of the vapor concentration entering the reaction chamber has a direct impact on the yield of epi films for every III-V compound semiconductor device, from LEDs to data and communications lasers to solar cells. Central delivery does improve concentration precision and with it yield in the most cost efficient way. We report on performance of a central delivery system for TMGa, a high-consumption organometallic compound and compare this performance to the performance of traditional onboard sources. (C) 2009 Elsevier B.V. All rights reserved.