High quality Zn1-xFexO thin films were deposited on alpha-sapphire substrates by RF magnetron sputtering. X-ray absorption fine structure measurements showed that the chemical valence of Fe ions in the films was a mixture of 2+ and 3+ states, and Fe ions substituted mainly for the Zn sites in the films. DC-magnetization measurements revealed ferromagnetic properties from 5 to 300 K. The photoluminescence measurements at 15 K showed a sharp main transition peak at 3.35 eV along with a broad impurity peak at 2.45 eV. The structural and magnetization analyses of the Zn1-xFexO films strongly suggested that the ferromagnetism was the intrinsic properties of the films. (C) 2010 Elsevier B.V. All rights reserved.