Journal of Crystal Growth, Vol.312, No.15, 2196-2200, 2010
Investigation of nonpolar (1 1 (2)over-bar 0) a-plane ZnO films grown under various Zn/O ratios by plasma-assisted molecular beam epitaxy
Structural and optical properties of nonpolar a-plane ZnO films grown with different II/VI ratios on r-plane sapphire substrates by plasma-assisted molecular beam epitaxy were investigated. Even by increasing the II/VI ratio across the stoichiometric flux condition a consistent surface morphology of striated stripes along the ZnO < 0 0 0 1> direction without any pit formation was observed, which is contrary to polar c-plane ZnO films. Root mean square surface roughness, full width at half maximum values of X-ray rocking curves, defect densities, and photoluminescence were changed with the II/VI ratio. The sample grown with stoichiometric flux condition showed the lowest value of rms roughness, the smallest threading dislocation and stacking fault densities of similar to 4.7 x 10(8) cm(-2) and similar to 9.5 x 10(4) cm(-1), respectively, and the highest intensity of D X peak. These results imply that the stoichiometric flux growth condition is suitable to obtain superior structural and optical properties compared to other flux conditions. (C) 2010 Elsevier B.V. All rights reserved.
Keywords:Molecular beam epitaxy;Characterization;Oxides;Zinc compounds;Semiconductiong II-VI materials