We built up a hybrid microscope system that consists of an atomic force microscope (AFM) and a laser confocal microscope with differential interference contrast microscope (LCM-DIM) and investigated the combined imaging of a potassium dihydrogen phosphate (KDP) crystal surface and its growth. Using this integrated setup, we were able to approach a AFM cantilever tip to several-ten mu m crystals using an optical microscope with AFM and to observe steps with measuring the height using LCM-DIM/AFM. Evaluation of the accuracy of the setup was studied and resulted in less than 100 nm of the AFM tip accuracy using LCM-DIM/AFM. We also demonstrated an in-situ observation of a KDP crystal growth using LCM-DIM/AFM. The interference fringes at the cantilever and the movements of steps were simultaneously observed. (C) 2010 Elsevier B.V. All rights reserved.