Nanocrystalline diamond film was deposited on the substrate of Mo-Re alloy foil by using a hot filament chemical vapor deposition (HFCVD) method. The morphology, band structures and crystalline structure of the film were analysed by scanning electron microscopy (SEM). Raman spectroscopy and X-ray diffractometer (XRD), respectively. The results show that the thickness of the diamond film is about 300 nm after 1 h deposition. There is a 2H-Mo2C layer between the diamond film and the Mo-Re substrate. The values of a and the ratio c/a of Mo2C are 3.003 and 1.579 angstrom, respectively. This Mo2C layer might be formed due to carbon atoms in the gas phase diffusing into the Mo-Re alloy. (C) 2010 Elsevier B.V. All rights reserved.