화학공학소재연구정보센터
Journal of Crystal Growth, Vol.314, No.1, 298-301, 2011
Effects of substrate orientation on aluminum grown on MgAl2O4 spinel using molecular beam epitaxy
Al thin films have been grown on single-crystal MgAl2O4 spinel substrates using solid source molecular beam epitaxy. The structural properties of Al layers were systematically investigated as a function of substrate orientation. X-ray diffraction reveals that Al layers are coherently grown on both (0 0 1)- and (1 1 1)-oriented spinel substrates. However, scanning electron microscopy and atomic force microscopy show that Al layers on (0 0 1) spinel substrates display smoother surface morphology than those grown on (1 1 1) spinel substrates. Additionally, electron backscatter diffraction and transmission electron microscopy demonstrate the presence of a high density of twin domain structures in Al thin films grown on (1 1 1) spinel substrates. (C) 2010 Published by Elsevier B.V.