In this study, the destruction rate of a volatile waste destruction system based on a microwave plasma torch operating at atmospheric pressure was investigated. Atmospheric air was used to maintain the plasma and was introduced by a compressor, which resulted in lower operating costs compared to other gases such as argon and helium. To isolate the output gases and control the plasma discharge atmosphere, the plasma was coupled to a reactor. The effect of the gas flow rate, microwave power and initial concentration of compound on the destruction efficiency of the system was evaluated. In this study, trichloroethylene and carbon tetrachloride were used as representative volatile organic compounds to determine the destruction rate of the system. Based on the experimental results, at an applied microwave power less than 1000W, the proposed system can reduce input concentrations in the ppmv range to output concentrations at the ppbv level. High air flow rates and initial concentrations produced energy efficiency values greater than 1000 g/kW h. The output gases and species present in the plasma were analysed by gas chromatography and optical emission spectroscopy, respectively, and negligible amounts of halogenated compounds resulting from the cleavage of C2HCl3 and CCl4 were observed. The gaseous byproducts of decomposition consisted mainly of CO2, NO and N2O, as well as trace amounts of Cl-2 and solid CuCl. (C) 2010 Elsevier B.V. All rights reserved.