The proton conductivity sigma across 100 nm thick, amorphous aluminum phosphate thin films under anhydrous conditions was investigated. The densely packed glass films were uniformly formed without formation of pinholes and clacks over the electrode substrate by multiple spin-coating with a mixed precursor sol, as checked by transmission electron microscopy. X-ray absorption spectroscopy, and Fourier transform infrared indicated that the Al-rich films were mainly composed of alumina and phosphate mixed glass phase, but the P-rich films involved a large amount of the aluminum metaphosphate glass moiety. sigma abruptly changed with Al/P ratio owing to this variation of glass network structure. The Al-rich films revealed the large activation energy E-a of about 1.0 eV, but the P-rich films revealed the small E-a of about 0.2 eV above 200 degrees C and they kept the value on the order of 10(-5) S cm(-1) at the temperatures. Consequently, the sigma of P-rich films were one order of magnitude higher than that of the others at around 300 degrees C. (C) 2011 Electrochemical Society. [DOI: 10.1149/1.3551572] All rights reserved.