Growth and Characterization of AlN and AlGaN Epitaxial Films on AlN Single Crystal Substrates

Dalmau R; Moody B; Schlesser R; Mita S; Xie J; Feneberg M; Neuschl B; Thonke K; Collazo R; Rice A; Tweedie J; Sitar Z

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Journal of the Electrochemical Society, Vol.158, No.5, H530-H535, 2011

Growth and Characterization of AlN and AlGaN Epitaxial Films on AlN Single Crystal Substrates

Dalmau R, Moody B, Schlesser R, Mita S, Xie J, Feneberg M, Neuschl B, Thonke K, Collazo R, Rice A, Tweedie J, Sitar Z

AlN and AlGaN epitaxial films were deposited by metal organic chemical vapor deposition on single crystal AlN substrates processed from AlN boules grown by physical vapor transport. Structural, chemical, and optical characterization demonstrated the high crystalline quality of the films and interfaces. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3560527] All rights reserved.