Macromolecular Rapid Communications, Vol.32, No.6, 518-522, 2011
Ring Opening Metathesis Polymerization Derived Polymers as Photoresists: Making Use of Thiol-ene Chemistry
Ring opening metathesis polymerization derived poly(norbornene) films and aggregates were crosslinked via photo chemically induced thiol-ene chemistry using a multifunctional thiol and the double bonds present in the polymer backbones. The presented method was illustrated by the description of a negative-toned photoresist formulation based on above mentioned ingredients.