화학공학소재연구정보센터
Macromolecules, Vol.43, No.19, 8290-8295, 2010
Enhancing the Potential of Block Copolymer Lithography with Polymer Self-Consistent Field Theory Simulations
Self-consistent field theory methodology is used to explore the graphoepitaxy of sphericalmorphology block copolymers templated by an array of posts, as well as to predict the formation lapel-iodic templated structures, giving an excellent agreement with experimental results. Simulations in two and three dimensions were performed on model hexagonal lattices of posts with spacing, L-post that was varied in the range L-post = 1.7 L-0 to 3.9 L-0, where L-0 is the equilibrium period of the block copolymer. The effects of changing the diameter of the posts and the volume fraction of the block copolymer were investigated, and the formation of a structure with designed aperiodicities was successfully modeled.