화학공학소재연구정보센터
Materials Chemistry and Physics, Vol.126, No.1-2, 337-343, 2011
Study of carbon nitride compounds synthesised by co-implantation of C-13 and N-14 in copper at different temperatures
Carbon nitride compounds have been synthesised in copper by simultaneous high fluence (10(18) at.cm(-2)) implantation of C-13 and N-14 ions. During the implantation process, the substrate temperature was maintained at 25, 250, 350 or 450 degrees C. Depth profiles of C-13 and N-14 were determined using the non-resonant nuclear reactions (NRA) induced by a 1.05 MeV deuteron beam. The retained doses were deduced from NRA measurements and compared to the implanted fluence. The chemical bonds between carbon and nitrogen were studied as a function of depth and temperature by X-ray photoelectron spectroscopy (XPS). The curve fitting of C 1s and N 1s core level photoelectron spectra reveal different types of C-N bonds and show the signature of N-2 molecules. The presence of nitrogen gas bubbles in copper was highlighted by mass spectroscopy. The structure of carbon nitride compounds was characterised by transmission electron microscopy (TEM). For that purpose, cross-sectional samples were prepared using a focused ion beam (FIB) system. TEM observations showed the presence of small amorphous carbon nitride "nanocapsules" and large gas bubbles in copper. Based on our observations, we propose a model for the growth of these nano-objects. Finally, the mechanical properties of the implanted samples were investigated by nano-indentation. (C) 2010 Elsevier B.V. All rights reserved.