The structure and surface morphology of Ni-incorporated diamond like carbon (Ni:DLC) films have been investigated. These films were deposited on Si substrates using pulsed laser deposition (PLD) technique. A KrF Excimer laser (lambda = 248 nm) was used for co-ablation from multi component Ni-graphite target. The concentration of Ni was varied by ablating the Ni part of the target with various numbers of laser pulses. The SEM and AFM analysis reveals that the surface is composed of segregates of Ni which increases with the increase in Ni content during the growth process. The structural investigations by XRD and Raman spectroscopy provided information about the orientation of the incorporated constituent and the ordering of the carbon species. Maximum height of the nano structures which were observed on the surface was similar to 50 nm. The G-peak of the graphite was shifted towards higher wave number due to enhancement in SP2 sites which have been increased due to the increase in the Ni concentration. A small change in the surface roughness ranging from 7.78 nm to 13.1 nm due to increased Ni concentration was also observed. (C) 2011 Elsevier B.V. All rights reserved.