A technique of using commercial polymers and additive to fabricate modified fluoropolymer films with low surface energy is proposed. A small amount of the additive can increase the oleophobic behavior of the fluoropolymer and so reduce its surface energy remarkably. The modified fluoropolymer films not only possess low surface energy and are solvent resistant but also have a high modulus. By a simple cast-molding process, both three-dimensional micropillars and complex letters with 100 nm linewidth can be replicated in the modified fluoropolymer films. Moreover, in the authors' experiment, the modified fluoropolymer film has shown its replicating competence for replicating high-aspect-ratio sub-30 nm structures. (c) 2010 American Vacuum Society. [DOI: 10.1116/1.3435329]