Single-walled carbon nanotubes (SWCNTs) have been considered as a promising nanostructured material for the realization of future nanoelectronic devices because of their unique electrical properties, such as the ballistic transportation of electrons or holes in SWCNTs. In this article, ultrapurified high-pressure carbon monoxide-grown SWCNTs were ultrasonically dispersed in toluene, dimethylformamide, and n-methyl pyrrolidone (NMP) for deposition and alignment. NMP was found to be the best solvent to disperse SWCNTs for the dielectrophoresis (DEP)-assisted deposition and alignment of SWCNTs among the three solvents. The alternating electric field-directed DEP method was successfully used to deposit and align SWCNTs onto four pairs of gold electrodes simultaneously. The current-voltage electrical property of the aligned SWCNTs was measured and compared for the four devices. The demonstration of simultaneous deposition and alignment of SWCNTs for several devices indicates that the DEP method could be used for the fabrication of SWCNT-based integrated devices. (C) 2010 American Vacuum Society [DOI: 10.1116/1.3378151]