Journal of Vacuum Science & Technology A, Vol.28, No.5, 1122-1125, 2010
Methods for measurement of electron emission yield under low energy electron-irradiation by collector method and Kelvin probe method
Secondary electron emission yield of gold under electron impact at normal incidence below 50 eV was investigated by the classical collector method and by the Kelvin probe method. The authors show that biasing a collector to ensure secondary electron collection while keeping the target grounded can lead to primary electron beam perturbations. Thus reliable secondary electron emission yield at low primary electron energy cannot be obtained with a biased collector. The authors present two collector-free methods' based on current measurement and on electron pulse surface potential buildup (Kelvin probe method). These methods are consistent, but at very low energy, measurements become sensitive to the earth magnetic field (below 10 eV). For gold, the authors can extrapolate total emission yield at 0 eV to 0.5, while a total electron emission yield of 1 is obtained at 40 +/- 1 eV. (C) 2010 American Vacuum Society. [DOI:10.1116/1.3462039]