In the present work, surface modifications generated by the low energy high current pulsed electron beam (LEHCPEB) treatments have been investigated on an AISI H13 (4Cr5MoSiV) steel. From the observations of scanning electron microscopy, x-ray diffraction, and electron back scattering diffraction determinations, it could be established that the final structure in the melted layer is a mixture of ultrafine delta phase, martensite, and residual austenite. The formation of the heterogeneous microstructures on the surface layer is related to the very rapid heating, melting, solidification, and cooling induced by the LEHCPEB irradiation. After the LEHCPEB treatment, the wear resistance of the steel effectively improved. This can be mainly attributed to the higher hardness of the ultrafine structures formed on the top surface and the hardened subsurface layers after the treatment. (C) 2010 American Vacuum Society. [DOI: 10.1116/1.3490019]