Polymer, Vol.51, No.18, 4058-4062, 2010
Photo-induced crosslinking of water-soluble polymers with a new photobase generator
A strong bicyclic guanidine base, 1,5,7-triaza-bicyclo[4.4.0]dec-5-ene (TBD), is photo-generated from its tetraphenylborate salt (TBD center dot HBPh4) and can effectively catalyze the transesterification reaction between the ester and hydroxy groups in polymers. Accordingly, with TBD center dot HBPh4 as a photobase generator, a water-soluble polymer blend, namely poly(1-vinylpyrrolidone-co-2-dimethylaminoethyl methacrylate) and 2-hydroxyethyl cellulose, has been developed as a potential eco-friendly photoresist. This photoresist system uses only water as a solvent and as a developer, rather than organic solvents and aqueous alkaline developers. The effects of the amount of photobase generator, polymer composition and photolithographic conditions on the photo-induced crosslinking and patterning of water-soluble polymers were studied. (C) 2010 Elsevier Ltd. All rights reserved.