Solid-State Electronics, Vol.58, No.1, 11-16, 2011
Impact of Ge-Sb-Te compound engineering on the set operation performance in phase-change memories
The phase-change memory (PCM) technology is considered as one of the most attractive non-volatile memory concepts for next generation data storage. It relies on the ability of a chalcogenide material belonging to the Ge-Sb-Te compound system to reversibly change its phase between two stable states. namely the poly-crystalline low-resistive state and the amorphous high-resistive state, allowing the storage of the logical bit. A careful study of the phase-change material properties in terms of the set operation performance, the program window and the electrical switching parameters as a function of composition is very attractive in order to enlarge the possible PCM application spectrum. Concerning the set performance, a crystallization kinetics based interpretation of the observed behavior measured on different Ge-Sb-Te compounds is provided, allowing a physics-based comprehension of the reset-to-set transition. (C) 2010 Elsevier Ltd. All rights reserved.
Keywords:Phase-change memory (PCM);Ge-Sb-Te ternary diagram;Chalcogenide material;Composition engineering;Set time performance;Crystallization kinetics