화학공학소재연구정보센터
Advanced Materials, Vol.23, No.10, 1252-1252, 2011
Transfer of Functional Ceramic Thin Films Using a Thermal Release Process
A simple, solder-based bonding and liftoff process for transfer of functional ceramic thin films is demonstrated. The process allows transfer of thin films from a growth wafer onto a target substrate in a single step, with separation from the growth substrate being driven by induced stresses during soldering. Free-standing films can also be produced.