Optical, structural and photocatalytic properties of TiO2 thin films obliquely deposited on quartz glass substrate using an electron-beam evaporation method were investigated. The photocatalytic activity of the films was evaluated by photodecomposition of methylene blue. An increase in incident deposition angle increased the porosity and surface roughness of the TiO2 films. As a result, the photocatalytic activity was enhanced with incident deposition angle up to 60 degrees. However, a further increase in incident deposition angle to 75 degrees reduced the photocatalytic activity due to a lack of the crystalline phase. (C) 2010 Elsevier B. V. All rights reserved.