ZnO thin films were prepared by pulsed laser deposition at room temperature on glass substrates with oxygen pressures of 10-30 Pa. The structural, electrical, and optical properties of ZnO films were studied in detail. ZnO films had an acceptable crystal quality with high c-axis orientation and smooth surface. The resistivity was in the 10(2) Omega cm order for ZnO films, with the electron concentration of 10(16)-10(17) cm(-3). All the films showed a high visible transmittance similar to 90% and a high UV absorption about 90-100%. The UV emission similar to 390 nm was observed in the photoluminescence spectra. The oxygen pressures in the 10-30 Pa range were suitable for room temperature growth of high-quality ZnO films. (C) 2010 Elsevier B.V. All rights reserved.