FePt multilayer films with and without Al underlayer were prepared by magnetron sputtering on SiO2 substrate and subsequently annealed in vacuum. Experimental results suggest that the existence of Al underlayer can effectively reduce the ordering temperature and increase the coercivity of FePt films. Due to the slight larger lattice constant of Al underlayer than that of FePt films, [Fe (0.66 nm)/Pt (0.84 nm)](30) films begin to order at 350 degrees C and the coercivity of them reach to 5.7 kOe after annealing at 400 degrees C for half an hour. (C) 2010 Elsevier B.V. All rights reserved.