In this study, the TiO2 nanotubes were fabricated by electrochemical anodization in a NH4F/Na2SO4/PEG400/H2O electrolyte system. Ultrasonic wave (80 W, 40 kHz) was used to clean the surface of TiO2 nanotube arrays in the medium of water after the completion of the anodization. Surface morphology (FESEM) and X-ray diffraction spectrum of the nanotubes treated by sonication at 0 min, 9 min, 40 min and 60 min were compared. The experimental results showed that the precipitate on the surface of the nanotube arrays could be removed by the ultrasonic wave. The treating time had an influence on the precipitate removal and 9 min (corresponding to 12 Wh) is the suitable time for surface cleaning of the TiO2 nanotubes on this experimental condition. Crown Copyright (C) 2011 Published by Elsevier B.V. All rights reserved.