This paper describes experimental relationship between surface acoustic wave (SAW) properties of two-port SAW resonators based on polycrystalline aluminum nitride (AlN) thin films grown on Si substrates by using a pulsed reactive magnetron sputtering system and their geometry's parameters. Moreover, the influence of post-deposition heat treatment on SAW properties of AlN thin films was investigated at different annealing temperature (600 degrees C and 900 degrees C). The measurement results show the number of the inter-digital transducers (IDT) finger pairs (N), the number of reflectors grating pairs (R) and the IDT center-to-center distance (L) related to insertion loss of SAW resonators. The best result of insertion loss was 15.6 dB for SAW resonators with R = 160 pair, N = 5 pair and L = 750 mu m. At the same geometry parameters, the SAW velocity and insertion loss were improved slightly after annealing at 600 degrees C and were worse for the films annealed at 900 degrees C by changes in the surface morphology and stress on the film. (C) 2011 Elsevier B.V. All rights reserved.