The casting molds including various shapes within axial and lateral resolution (110 mu m and 5 mu m) could be precisely fabricated and were suitable for the fabrication of PDMS microchannel possessing the larger inner volume for the purpose of the rapid capillary force migration. The tight bonding between PDMS mold and SiO2/Si surface not only was governed by the flexibility and the degree of tilted angle (TA) of PDMS microchannel which shows the minimum value at the 0.2 weight ratio (W-r) of curing agent but also efficiently generates the capillary migration. Crown Copyright (C) 2011 Published by Elsevier B.V. All rights reserved.