Erosion of electrode material in ultrahigh-frequency (UHF) discharge plasma was investigated as a method of obtaining highly disperse powders and complex multiphase systems. The effect of the flow rate of the plasma-forming gas on electrode erosion was investigated. Data are reported on the effect of the current on electrode erosion in conditions of UHF-discharge plasma. The products or erosion obtained were characterized and investigated by scanning electron microscopy and other methods. The possible areas of application of these materials in science and technology are examined.