The possibility of tailoring titania nanotube films on Ti-6Al-4V alloy is investigated using electrolytes based on NH4H2PO4 with the addition of different concentrations of NFU. Several morphologies from high aspect ratio nanotubes to barrier layers are achieved by the control of the electrolyte composition, regarding its pH and fluoride concentrations. The morphology and composition of the anodic layers were evaluated by scanning and transmission electron microscopy. Rutherford backscattering spectroscopy (RBS) and Wavelength dispersive X-ray fluorescence spectroscopy. The formation efficiency and the fluoride ions content in the nanotubes depend on the F concentration in the electrolyte. The higher concentration of fluoride ions in the electrolyte promotes an increase of the F incorporated in the nanotubes, about 12 at.% but, reduces the nanotube formation efficiency. However, no significant presence of phosphorus was detected into the films by means of the above-mentioned analytical techniques. (C) 2011 Elsevier Ltd. All rights reserved.