Journal of Crystal Growth, Vol.323, No.1, 522-524, 2011
Effects of AlGaAsSb electron supply layer for InGaAs/InAlAs metamorphic HEMTs on GaAs substrate
We studied the effects of an AlGaAsSb electron supply layer for InGaAs/InAlAs metamorphic high electron mobility transistors (mHEMTs) on GaAs substrate. By implementing an AlGaAsSb electron supply layer, we drastically improved the electron mobility of InGaAs/InAlAs heterostructures for mHEMTs. An AlGaAsSb electron supply layer for InGaAs/InAlAs heterostructures on GaAs substrates promises high-performance mHEMTs with low production cost. (C) 2011 Elsevier B.V. All rights reserved.
Keywords:Doping;Molecular beam epitaxy;Quantum wells;Antimonides;Semiconducting III-V materials;High electron mobility transistors