화학공학소재연구정보센터
Journal of Crystal Growth, Vol.327, No.1, 221-226, 2011
Understanding the sprayed boric acid method for bulk doping of silicon ribbons
The sprayed boric acid (SBA) method for bulk doping of silicon ribbons is investigated. Experimental procedures and main results are reviewed. Computational fluid dynamics and experimental tests using partial spraying suggest the role of gas transported evaporated boron oxide to explain the boron incorporation profiles along the sample. The industrial applicability of the SBA method is discussed. (C) 2011 Elsevier B.V. All rights reserved.