Epitaxial layered cobaltite Na0.5-0.7CoO2 thin films have been grown on planar SrTiO3 (1 0 0), SrTiO3 (1 1 0), LaAlO3 (1 0 0) and alpha-Al2O3 (0 0 0 1) substrates successfully by pulse laser deposition. The annealing temperature to influence of the crystal structure, surface morphology and electrical transport properties of NaxCoO2 thin films has been investigated. The layered structure of NaxCoO2 film and the interface between the film and substrate have been observed clearly by high resolution transmission electron microscopy. Vicinal cut SrTiO3 (1 0 0) substrates with the c-axis tilted angle theta 3-10 degrees have been used to grow NaxCoO2 thin films, which reveals that the c-axis orientation epitaxial growth on vicinal cut SrTiO3 (1 0 0) substrates only occurred when tilted angle theta <= 5 degrees. (C) 2011 Elsevier B.V. All rights reserved.