Many applications based on TiO2 thin films are strongly influenced by the film crystalline quality, microstructure and surface morphology. We have utilized x-ray scattering methods for crystal structure study of TiO2 films, grown by DC reactive magnetron sputtering without heating. We have observed the formation of ordered phases after post-deposition ex-situ annealing in air at 600 degrees C. The distinct biaxial texture with respect to the c-plane (0001) Al203 substrate surface, which developed during heating, shows remarkable patterns in pole figures. We have identified epitaxial relationships of anatase A(001)[110]parallel to sub(001)[1 (1) over bar 00] and rutile R(100)[001]parallel to sub(0001)[100] within single TiO2 layer. In addition, within the same sample, we have observed the anatase in (112) orientation with two in-plane relationship options A(112)[1 (1) over bar0]parallel to sub[2 (1) over bar(1) over bar0] and A(112)(1 (1) over bar0]parallel to sub(0001)[1 (1) over bar 00]. (C) 2011 Elsevier B.V. All rights reserved.