Diffusion of silver inner-electrode occurred during sintering of commercial low temperature co-fired glass ceramic substrate made the dielectric surface become light yellow. The samples added with silicon oxide (SiO(2)) powder, however, maintained white color. Silicon-oxide powder was used to modified the sintering behavior and inhibit the silver ions diffusion for the LTCC ceramics. The alumina particles in the LTCC substrates could be regarded as the diffusion barrier of silver ions. The activation energy for silver ions diffusion in the LTCC substrates was 101 kJ/mol. When 5 wt% SiO(2) powder was added into the LTCC substrate, the diffusion activation energy of silver ions became 145 kJ/mol. At sintering temperature of 1180 K, the diffusion coefficient of silver ion in the LTCC ceramic substrates with and without additional SiO(2) were 8.88 x 10(-13) cm(2)/s and 1.08 x 10(-12) cm(2)/s, respectively.