A study has been made of the flow, heat transfer and thermophoretic transport with application to external vapor deposition processes. In this work the system studied consists of a jet emerging from a burner containing silica soot particles that are impinging on a disk which serves as the target for the depositing material. The motion of the particles is determined from the combined effects of thermophoresis, buoyancy and the forced how. The governing conservation equations, which include the effects of buoyancy, variable properties and thermophoretic transport have been solved numerically. The effects of the particle distribution at the exit from the burner, the burner location, and the disk dimensions on particle deposition are studied. The local and average particle deposition and heat fluxes and the variation of the deposition efficiency are investigated over a range of values of the parameters.