The fabrication process to produce Si wires with superior structural properties for application in Li-ion batteries is described. The process is based on the electrochemical etching of pores in Si, followed by a chemical over-etching step. The wires obtained have a quadratic cross section of around 1.5 x 1.5 mu m and are organized in an array stabilized by two in-situ-created supports. An electrodeposited Cu film on the array is used as current collector. The method described is a production-near process with a potential for low costs and high yield. (C) 2011 The Electrochemical Society. [DOI: 10.1149/2.069111jes] All rights reserved.