Hierarchical dual pillar surfaces with optimized pillar intervals are fabricated by a novel combined process of the c oblique angle magnetron sputtering deposition of Al-Nb alloys and their anodizing. The pillar intervals are controlled by the deposition angle and cell size of a scalloped substrate for oblique angle deposition. Anodizing of the deposited pillar surfaces develops a nanopillar oxide layer, producing the hierarchical dual pillar surfaces. After being coated with a fluoroalkyl phosphate layer to reduce the surface free energy, hierarchical surfaces with submicrometer pillar intervals greater than 400 nm show super liquid repellency even for hexadecane with a low surface tension of 27.5 mN m(-1), although the submicrometer pillar surfaces with smaller submicrometer pillar intervals and without nanopillars were not super-oil-repellent. In contrast, the dual pillar surfaces show superhydrophobicity regardless of the submicrometer pillar intervals. Thus, the present study demonstrates the importance of the pillar intervals (gap size between pillars) to realize the superoleophobicity.