Here we describe the behavior of self-assembled monolayers (SAMs) of 4'-cyanobiphenyl-4-thiol (CBPT) on Au(111) upon electron irradiation. Under such a treatment, the aromatic framework of CBPT SAMs is laterally cross-linked while the nitrile groups, located at the SAM-ambience interface, are reduced to active amine moieties which can be used as docking sites for the coupling of other species. This makes CBPT monolayers as a promising system for conventional and chemical lithography as well as for nano-fabrication. Along these lines, we demonstrate the preparation of complex polymer brushes, patterning of the underlying substrate, and fabrication of molecule-thin, free-standing membranes on the basis of CBPT SAMs. The balance between the application-favorable processes and defragmentation in these films is studied in detail, and comparison to the well-established (for the relevant applications) system of 4'-nitrobiphenyl-4-thiols is performed. Taking CBPT SAMs as a model system, the effect of the energy of the primary electrons on the extent of the chemical transformation and cross-linking in substituted aromatic SAMs is investigated.