화학공학소재연구정보센터
Materials Chemistry and Physics, Vol.128, No.3, 405-409, 2011
Picosecond laser pulse-driven crystallization behavior of SiSb phase change memory thin films
Transient phase change crystallization process of SiSb phase change thin films under the irradiation of picosecond (ps) laser pulse was studied using time-resolved reflectivity measurements. The ps laser pulse-crystallized domains were characterized by atomic force microscope, Raman spectra and ellipsometrical spectra measurements. A reflectivity contrast of about 15% can be achieved by ps laser pulse-induced crystallization. A minimum crystallization time of 11 ns was achieved by a low-fluence single ps laser pulse after pre-irradiation. SiSb was shown to be very promising for fast phase change memory applications. (C) 2011 Elsevier B.V. All rights reserved.