Ba-Ti-O films were prepared on Pt-coated Si substrate by laser chemical vapor deposition, and their orientations and microstructures were compared. Ba2TiO4, BaTiO3, BaTi2O5, Ba4Ti13O30 and BaTi4O9 single-phase films were prepared at Ti to Ba molar ratio from 0.41 to 3.49. The alpha'-Ba2TiO4 film showed (010) and (091) co-orientation with elongated, truncated columnar grains. The BaTiO3 film was composed of triangular and hexagonal grains with slight (111) orientation. The BaTi2O5 film had (010) orientation and faceted columnar grains. The Ba4Ti13O40 film showed (1 0 0) and (0 1 2) co-orientation with shellfish-like grains. The BaTi4O9 film showed (0 1 0) orientation with slightly rounded faceted columnar grains. The deposition rates of Ba-Ti-O films ranged from 30 to 144 mu m h(-1). (C) 2012 Elsevier B.V. All rights reserved.