As a novel thermal spray process, very low pressure plasma spray (VLPPS) process has been significantly used to deposit thin, dense and homogenous ceramic coating materials for special application needs in recent years. In this study, in order to enhance low-energy plasma jet under very low pressure ambience, a home-made transferred arc nozzle was made and mounted on a low-power F100 plasma torch to fully melt or evaporate powder feedstock. As a result, thin and dense alumina (Al(2)O(3)) and yttria-stabilized zirconia (YSZ) ceramic coatings with an average thickness of 30-40 mu m were successfully elaborated by the VLPPS process below 1 mbar. An optical emission spectroscopy (OES) was used to analyze the plasma jet properties. The microstructures of the coatings were observed by means of a scanning electron microscopy (SEM). It was found that the YSZ coatings displayed a bimodal microstructure which was composed of splats formed by melted particles and a little amount of vapor condensation from evaporated particles. However, vapor condensation could not be observed in the Al(2)O(3) coatings, and only lamellar splats were found. The mechanical properties of both coatings were also evaluated. (C) 2011 Elsevier B.V. All rights reserved.