The electroless NiCoFeP films were deposited on a silicon substrate in a bath containing Ni(2+), Co(2+), and Fe(2+) ions with a concentration ratio of 1:1.9:1.2. These films were characterized by using transmission electron microscope, energy dispersive X-ray spectrometer, and alternating gradient magnetometer for their microstructure, crystal structure, and magnetic properties. The result showed that the film deposited at the initial stage (about 10 s) consists of only one phase with a crystal structure of FCC Ni and a composition about Ni (69 at%), Co (19 at%), Fe (4 at%), and P (7 at%); The film deposited at the latter stage (about 30 s) consists of two phase, one is similar to that of initial stage and the other has crystal structure of HCP Co with a composition about Ni (35 at%), Co (44 at%), Fe (19 at%), and P (2 at%). The saturation magnetization and coercivity of electroless NiCoFeP films vary from 525 to 1546 emu/cm(3) [0.68-2.01 T] and from 51.44 to 88.5 Oe [4.09-7.04 kA/m], respectively. (C) 2011 Elsevier B. V. All rights reserved.