Titanium alloys are very attractive materials because they have high specific strength, excellent corrosion and erosion resistance in many active environments. However, their low hardness values and poor tribological properties require improvement of their surface properties. The present study is concerned with the fabrication of Zr and Zr-N alloying layers in the surfaces of Ti-6Al-4V substrates by plasma surface alloying technique. The microstructure, chemical composition and hardness of the surface alloying layers were analyzed to understand the mechanisms of surface alloying and hardness improvement. The Zr and Zr-N surface alloying layers formed were homogeneous and compact, in which the surface alloying elements all displayed gradient distributions. The Zr and Zr-N surface alloying layers all enhanced the surface hardness of Ti-6Al-4V alloy. Zr-N surface alloying resulted in greater improvement in hardness and the maximum microhardness of (1.37 +/- 0.04) x 10(3) HK was obtained at the subsurface, which was much higher than that of the untreated Ti-6Al-4V alloy. The Zr-N surface alloying layer consisted of an outer nitride layer and an inner diffusion zone of Zr and N, and its very high hardness owed to the formation of the nitride layer. The mechanism of hardness improvement of Zr surface alloyed Ti-6Al-4V alloy was solid solution strengthening. (C) 2011 Elsevier B. V. All rights reserved.