화학공학소재연구정보센터
Applied Surface Science, Vol.258, No.6, 2192-2195, 2012
Microwave excitation and readout of nano- and micron scale cantilevers
We show that a microwave near-field coaxial resonator system allows mechanical cantilever excitation on a scale much shorter than the microwave wavelength. Thermal noise is observed in the unexcited system, enabling room temperature displacement sensitivity of similar to 70 fm/Hz(1/2). The measured force between nearfield probe and cantilever varies with separation, in excellent agreement with theory. Uniquely, optical excitation and read-out lasers are also included. The dependence of mechanical resonator quality factor on ambient air pressure has been accurately measured. We have demonstrate passive cantilever mode cooling from 300 K to 80 K by frequency detuning the microwave resonator and propose pulsed cooling operation to enable several high-sensitivity applications. Crown Copyright (C) 2011 Published by Elsevier B.V. All rights reserved.